Electrical and Computer Engineering ETDs

Publication Date

Fall 12-16-2021

Abstract

The resolution limit of optical microscopy can be extended by using Imaging Interferometric Microscopy (IIM), which uses a low numerical aperture (NA) objective lens to achieve resolution equivalent to that of a high-NA objective lens with multiple sub-images. Along with the resolution enhancement challenge, IIM often suffers from poor image quality. In this dissertation, several image quality improvement methods are proposed and verified with simulation and experimental results. Next, techniques to extend the resolution limit of IIM to ≤ 100nm using a low-NA objective lens are demonstrated. An experimental technique of using a grating coupler on a planar waveguide is also demonstrated to extend the resolution limit of IIM. Lastly, the capability of IIM is demonstrated by imaging arbitrary structures in a biological sample where a resolution of ≤ 300nm is achieved. This extended resolution of IIM with high image quality will be helpful in optical metrology and biological research.

Keywords

Optical Microscopy, Image Processing, Signal Processing, Optical Imaging, Metrology, Nanofabrication

Sponsors

National Science Foundation (NSF)

Document Type

Dissertation

Language

English

Degree Name

Electrical Engineering

Level of Degree

Doctoral

Department Name

Electrical and Computer Engineering

First Committee Member (Chair)

Prof. Steven R. J. Brueck

Second Committee Member

Prof. Ramiro Jordan

Third Committee Member

Prof. Keith Lidke

Fourth Committee Member

Prof. Tonmoy Chakraborty

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