The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\\%) micro-mirrors.
Optical MEMS, Fabry-Perot interferometers, Microactuators, Quantum electrodynamics, Integrated optics.
Level of Degree
Electrical and Computer Engineering
First Committee Member (Chair)
Biedermann, Grant W.
Second Committee Member
Benito, Francisco Martin. "MEMS enabled Fabry-Perot cavity for cQED experiments." (2011). https://digitalrepository.unm.edu/ece_etds/30