Mechanical Engineering ETDs
Publication Date
Fall 11-13-2022
Abstract
Lead zirconate titanate (PZT) has been a material of interest for sensor, actuator, and transducer applications in microelectromechanical systems (MEMS). This is due to their favorable piezoelectric, pyroelectric and ferroelectric properties. While various methods are available to deposit PZT thin films, radio frequency (RF) magnetron sputtering was selected to provide high quality PZT films with the added capability of batch processing. These sputter deposited PZT films were characterized to determine their internal film stress, Young’s modulus, composition, and structure. After characterization, the sputtered PZT samples were poled using corona poling and direct poling methods. As a means of comparison, commercially deposited sol-gel PZT films were also characterized and poled. To assess the mechanical viability of the sol-gel and sputter deposited PZT films, the neutral axis and eigenfrequencies with each type of deposited PZT were determined for a typical MEMS device stack. It was discovered that highly tailored PZT films are possible with RF magnetron sputtering as a result of its adjustable deposition parameters allowing for a highly controlled and tunable process. However, further optimization is required to produce PZT films with the correct composition and structure.
Keywords
PZT, Lead Zirconate Titanate, Radio Frequency (RF) Magnetron Sputtering, piezoelectric
Degree Name
Mechanical Engineering
Level of Degree
Masters
Department Name
Mechanical Engineering
First Committee Member (Chair)
Dr. Nathan Jackson
Second Committee Member
Dr. Matthias Pleil
Third Committee Member
Dr. Christina Salas
Document Type
Thesis
Language
English
Recommended Citation
Miles, Katherine Lynne. "Material Characterization and Comparison of Sol-gel Deposited and RF Magnetron Deposited Lead Zirconate Titanate Thin Films." (2022). https://digitalrepository.unm.edu/me_etds/218
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