Nanoscience and Microsystems ETDs

Publication Date

Fall 11-12-2020


This thesis attempts to establish the groundwork for integrating a GaN nanowire into an AFM probe resulting in a universal atomic force microscope probe. Previous studies have shown GaN nanowires have stable mechanical properties, can be fabricated at scale with high aspect ratios and very smooth side walls, and have intrinsic lasing capabilities; however, mechanical and lasing capabilities have not yet been integrated into a single AFM probe. Here, we develop and analyze a suspended waveguide optical pumping concept that can be fabricated and applied to an AFM probe cantilever, unlocking full potential of GaN’s optical and mechanical properties as an AFM probe tip. We also develop a novel method and discover key insights into tuning the stress of SiO2 suspended films without effecting refractive index, a process step that is critical to the fabrication of the universal AFM probe and applicable to other applications such as distributed Bragg reflectors.


GaN, Waveguide, AFM, Stress, Silicon Dioxide, Thin Film

Document Type


Degree Name

Nanoscience and Microsystems

Level of Degree


Department Name

Nanoscience and Microsystems

First Committee Member (Chair)

Dr. Tito Busani

Second Committee Member

Dr. Alejandro Manjavacas

Third Committee Member

Dr. Nathan Jackson